Diamond-like carbon films deposited in a dual...

Materials Science and Engineering: B 1992 Vol. 11; Iss. 1-4

Diamond-like carbon films deposited in a dual microwave-radio-frequency plasma

O.M. Küttel, L. Martinu, D. Poitras, J.E. Klemberg-Sapieha, M.R. Wertheimer
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(92)90233-y
File:
PDF, 283 KB
english, 1992
Conversion to is in progress
Conversion to is failed