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Ion beam synthesis of Si3N4 amorphous buried layers
A.I. Belogorokhov, A.B. Danilin, V.N. Mordkovich, O.I. VyletalinaVolume:
12
Year:
1992
Language:
english
Pages:
2
DOI:
10.1016/0921-5107(92)90259-c
File:
PDF, 117 KB
english, 1992