Synthesis of thin buried CoSi2 layers by low energy cobalt...

Materials Science and Engineering: B 1992 Vol. 12; Iss. 1-2

Synthesis of thin buried CoSi2 layers by low energy cobalt implantation

R. Jebasinski, S. Mantl, Ch. Dieker
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Volume:
12
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(92)90273-c
File:
PDF, 354 KB
english, 1992
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