Electric field dependent paramagnetic defect creation in...

Materials Science and Engineering: B 1992 Vol. 12; Iss. 1-2

Electric field dependent paramagnetic defect creation in single-step high dose oxygen implanted SIMOX films

J.-L. Leray, J. Margail, R.A.B. Devine
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Volume:
12
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(92)90277-g
File:
PDF, 342 KB
english, 1992
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