Non-destructive characterization of thin film SIMOX structures using microscope spectrophotometry
Alan J. Criddle, Peter J. Pearson, Karen J. Reeson, Amarjit K. Robinson, Peter L.F. Hemment, Chris D. March, G.Roger BookerVolume:
12
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0921-5107(92)90283-f
File:
PDF, 630 KB
english, 1992