Effect of substrate temperature on the properties of ZrO2 films prepared by d.c. reactive magnetron sputtering
M.H. Suhail, G. Mohan Rao, S. MohanVolume:
12
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(92)90295-k
File:
PDF, 464 KB
english, 1992