Surface loss probability of H radicals on silicon thin...

Surface loss probability of H radicals on silicon thin films in SiH4/H2 plasma

Abe, Yusuke, Fukushima, Atsushi, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Sekine, Makoto, Hori, Masaru
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
113
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4773104
File:
PDF, 1.22 MB
english, 2013
Conversion to is in progress
Conversion to is failed