Homogeneity of carbon microdistribution in edge-defined film-fed grown polycrystalline silicon
B. Pivac, A. Borghesi, M. Amiotti, A. SassellaVolume:
18
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0921-5107(93)90123-5
File:
PDF, 592 KB
english, 1993