[IEEE 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Boston, MA, USA (4-6 May 2004)] 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) - Analysis of wafer process duration for ab initio calculation of capacity, throughput and bottleneck equipments in a wafer fab
Etzel, H., Staudt, P., Oertel, H., Dudde, R.Year:
2004
Language:
english
DOI:
10.1109/asmc.2004.1309591
File:
PDF, 297 KB
english, 2004