![](/img/cover-not-exists.png)
Argon sputtering analysis of the growing surface of hydrogenated amorphous silicon films
Lin, Guang Hai, Doyle, James R., He, Muzhi, Gallagher, AlanVolume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.341461
File:
PDF, 1.11 MB
english, 1988