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Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer
Chen, Xu, Huang, Tianbin, Wang, Ligong, Jin, Qiji, Cha, LiangzhenVolume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2137330
File:
PDF, 367 KB
english, 2006