Growth of thin β-SiC layers by carbonization of Si surfaces by rapid thermal processing
V. Cimalla, K.V. Karagodina, J. Pezoldt, G. EichhornVolume:
29
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0921-5107(94)04047-8
File:
PDF, 611 KB
english, 1995