Cu gettering in ion implanted and annealed silicon in...

Cu gettering in ion implanted and annealed silicon in regions before and beyond the mean projected ion range

Kögler, R., Peeva, A., Lebedev, A., Posselt, M., Skorupa, W., Özelt, G., Hutter, H., Behar, M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1602951
File:
PDF, 389 KB
english, 2003
Conversion to is in progress
Conversion to is failed