Cu gettering in ion implanted and annealed silicon in regions before and beyond the mean projected ion range
Kögler, R., Peeva, A., Lebedev, A., Posselt, M., Skorupa, W., Özelt, G., Hutter, H., Behar, M.Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1602951
File:
PDF, 389 KB
english, 2003