Process-induced defects in manufacture of GaAs monolithic...

Materials Science and Engineering: B 1994 Vol. 28; Iss. 1-3

Process-induced defects in manufacture of GaAs monolithic microwave integrated circuits

R.K. Purohit, G.C. Dubey, S. Dayal, R. Gulati, V.R. Balakrishnan, Koteshwar Rao, A.K. Sreedhar
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Volume:
28
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(94)90062-0
File:
PDF, 304 KB
english, 1994
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