Fabrication of seamless three-dimensional roll mold using...

Fabrication of seamless three-dimensional roll mold using direct electron-beam writing on rotating cylindrical substrate

Taniguchi, Jun, Tsuji, Shintaro, Aratani, Masao
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3511474
File:
PDF, 1.07 MB
english, 2010
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