Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
Fabrication of seamless three-dimensional roll mold using direct electron-beam writing on rotating cylindrical substrate
Taniguchi, Jun, Tsuji, Shintaro, Aratani, MasaoVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3511474
File:
PDF, 1.07 MB
english, 2010