Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2000 Vol. 18; Iss. 1
Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy
De Wolf, P., Stephenson, R., Trenkler, T., Clarysse, T., Hantschel, T., Vandervorst, W.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591198
File:
PDF, 350 KB
english, 2000