[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes
Chen, Kuan-Lin, Wang, Shasha, Salvia, James, Howe, Roger T., Kenny, Thomas W.Year:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285839
File:
PDF, 711 KB
english, 2009