Effect of nitrogen contamination by crucible encapsulation on polycrystalline silicon material quality
S. Binetti, M. Acciarri, C. Savigni, A. Brianza, S. Pizzini, A. MusinuVolume:
36
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(95)01268-0
File:
PDF, 431 KB
english, 1996