Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 3
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Growth of AlGaN containing nanometer scale compositional inhomogeneities for ultraviolet light emitters
Sampath, A. V., Garrett, G. A., Enck, R. W., Rottella, P., Shen, H., Wraback, M.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3585660
File:
PDF, 517 KB
english, 2011