Growth of AlGaN containing nanometer scale compositional...

Growth of AlGaN containing nanometer scale compositional inhomogeneities for ultraviolet light emitters

Sampath, A. V., Garrett, G. A., Enck, R. W., Rottella, P., Shen, H., Wraback, M.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3585660
File:
PDF, 517 KB
english, 2011
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