Influence of hydrogen and oxygen on the melt properties and...

Materials Science and Engineering: B 1996 Vol. 36; Iss. 1-3

Influence of hydrogen and oxygen on the melt properties and the crystal growth in silicon

Atsushi Ikari, Hitoshi Sasaki, Eiji Tokizaki, Kazutaka Terashima, Shigeyuki Kimura
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Volume:
36
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(95)01294-x
File:
PDF, 246 KB
english, 1996
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