Oxygen precipitates in annealed CZ silicon wafers detected...

Materials Science and Engineering: B 1996 Vol. 36; Iss. 1-3

Oxygen precipitates in annealed CZ silicon wafers detected by SIRM and FTIR spectroscopy

Caroline Veve, Michael Stemmer, Santo Martinuzzi
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Volume:
36
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(95)01303-2
File:
PDF, 333 KB
english, 1996
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