Collective fabrication of microsystems compatible with CMOS...

Materials Science and Engineering: B 1995 Vol. 35; Iss. 1-3

Collective fabrication of microsystems compatible with CMOS through the CMP service

J.M. Karam, B. Courtois, J.M. Paret
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Volume:
35
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(95)01337-7
File:
PDF, 459 KB
english, 1995
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