Proton implantation of AlxGa1 − xAsGaAs resonant-tunnelling...

Materials Science and Engineering: B 1995 Vol. 35; Iss. 1-3

Proton implantation of AlxGa1 − xAsGaAs resonant-tunnelling diode structures

K. Billen, M.J. Kelly, S.V. Hutchinson, M. Henini, G. Hill
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Volume:
35
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0921-5107(95)01356-3
File:
PDF, 478 KB
english, 1995
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