Novel high temperature metal organic chemical vapor...

Materials Science and Engineering: B 1995 Vol. 35; Iss. 1-3

Novel high temperature metal organic chemical vapor deposition vertical rotating-disk reactor with multizone heating for GaN and related materials

R. Walker, A.I. Gurary, C. Yuan, P. Zawadzki, K. Moy, T. Salagaj, A.G. Thompson, W.J. Krolla, R.A. Stall, N.E. Schumaker
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Volume:
35
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(95)01366-0
File:
PDF, 348 KB
english, 1995
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