Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp
S. Miyajima, W.I. Milne, S.F. Yoon, H.S. TanVolume:
35
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0921-5107(95)01390-3
File:
PDF, 599 KB
english, 1995