A closed UHV focused ion beam patterning and MBE regrowth...

Materials Science and Engineering: B 1995 Vol. 35; Iss. 1-3

A closed UHV focused ion beam patterning and MBE regrowth technique

H. Muessig, Th. Hackbarth, H. Brugger, A. Orth, J.P. Reithmaier, A. Forchel
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Volume:
35
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0921-5107(95)01397-0
File:
PDF, 556 KB
english, 1995
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