Real-time monitoring of heteroepitaxial growth processes on...

Real-time monitoring of heteroepitaxial growth processes on the silicon(001) surface by p-polarized reflectance spectroscopy

Klaus J. Bachmann, Uwe Rossow, Nikolaus Dietz
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Volume:
35
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0921-5107(95)01411-x
File:
PDF, 584 KB
english, 1995
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