The compact microcrystalline Si thin film with structure uniformity in the growth direction by hydrogen dilution profile
Gu, Jinhua, Zhu, Meifang, Wang, Liujiu, Liu, Fengzhen, Zhou, Bingqing, Zhou, Yuqin, Ding, Kun, Li, GuohuaVolume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2126122
File:
PDF, 422 KB
english, 2005