Effect of native point defects on morphology of gettering centres in CZ-silicon wafers
K.L. Enisherlova, T.F. Rusak, M.G. Mil'vidskii, V.J. ReznickVolume:
36
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(95)01427-6
File:
PDF, 381 KB
english, 1996