Enhancement of side wall growth rate during MOVPE growth on patterned substrates with CCl4
Moo-Sung Kim, Yong Kim, Seong-Il Kim, Seong-Min Hwang, Joon-Mo Kang, Yang-Keun Park, Suk-Ki MinVolume:
35
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(95)01439-x
File:
PDF, 388 KB
english, 1995