Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor
E.A. Garibin, I.A. Mironov, S.E. Khoruzhnikov, A.N. Vorob'evVolume:
39
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/0921-5107(95)01521-3
File:
PDF, 693 KB
english, 1996