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The mean projected range and range straggling of Xe ions implanted in Si and Si1N1.375H0.603
Ke-Ming Wang, Bo-Rong Shi, Hai-Yan Guo, Wei-Wang, Pei-Jun DingVolume:
39
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(95)01536-1
File:
PDF, 523 KB
english, 1996