Diffusion of 18 elements implanted into thermally grown...

Diffusion of 18 elements implanted into thermally grown SiO[sub 2]

Francois-Saint-Cyr, H. G., Stevie, F. A., McKinley, J. M., Elshot, K., Chow, L., Richardson, K. A.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1624487
File:
PDF, 370 KB
english, 2003
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