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Generation of Uniform Large-Area VHF Plasmas by Launching a Traveling Wave
Chen, Hsin-Liang, Tu, Yen-Cheng, Hsieh, Cheng-Chang, Ai, Chi-Fong, Tsai, Wen-Fa, Leou, Keh-ChyangVolume:
11
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201300101
Date:
January, 2014
File:
PDF, 401 KB
english, 2014