Mechanical properties of amorphous hydrogenated carbon films fabricated on polyethylene terephthalate foils by plasma immersion ion implantation and deposition
Li, Jing, Tian, Xiubo, Yang, Shiqin, Chu, Paul K., Fu, Ricky K. Y.Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2891253
File:
PDF, 850 KB
english, 2008