Magnetic nanostructures produced by electron beam patterning of direct write transition metal fluoride resists
Streblechenko, DmitryVolume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581154
Date:
May, 1998
File:
PDF, 1.15 MB
english, 1998