Kinetics and reaction mechanisms of laser-assisted chemical...

Kinetics and reaction mechanisms of laser-assisted chemical vapor deposition of polycrystalline silicon dots from silane

Pauleau, Y., Tonneau, D.
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Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1430884
File:
PDF, 328 KB
english, 2002
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