Submicron trenching of semiconductor nanostructures

Applied Physics Letters 1989 Vol. 55; Iss. 7

Submicron trenching of semiconductor nanostructures

Lee, K. Y., Smith, T. P., Ford, C. J. B., Hansen, W., Knoedler, C. M., Hong, J. M., Kern, D. P.
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Volume:
55
Year:
1989
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.101805
File:
PDF, 652 KB
english, 1989
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