Characterization on microstructures of tungsten/barrier...

Journal of Applied Physics 2002 Vol. 91; Iss. 12

Characterization on microstructures of tungsten/barrier metals (TiN,WN[sub x])/silicon multilayer films

Yang, Jun-Mo, Choi, Il-Sang, Kim, Yong Soo, Park, Ju-Chul, Lee, Sang-Moo, Hong, Tae-Eun, Park, Yoon-Beak, Lee, Soun-Young, Kim, Yil Wook
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Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1479753
File:
PDF, 871 KB
english, 2002
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