Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes
Tung, Chih-kuan, Riehn, Robert, Austin, Robert H.Volume:
3
Year:
2009
Language:
english
Journal:
Biomicrofluidics
DOI:
10.1063/1.3212074
File:
PDF, 517 KB
english, 2009