Structural characteristics of ZnO films grown on (0001) or (11−20) sapphire substrates by atomic layer deposition
Liu, Kuang-Pi, Yen, Kuo-Yi, Lin, Ping-Yuan, Gong, Jyh-Rong, Wu, Kun-Da, Chen, Wei-LiVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3523289
File:
PDF, 841 KB
english, 2011