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[IEEE Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (12-13 June 1989)] Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Low-resistance submicron CVD W interlevel via plugs on Al-Cu-Si
Joshi, R.V., Brodsky, S.B., Bucelot, T., Jaso, M.A., Uttecht, R.Year:
1989
Language:
english
DOI:
10.1109/vmic.1989.78013
File:
PDF, 598 KB
english, 1989