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Velocity distribution function of sputtered gallium atoms during inductively coupled argon plasma treatment of a GaAs surface
Despiau-Pujo, Emilie, Chabert, Pascal, Ramos, Raphaël, Cunge, Gilles, Sadeghi, NaderVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3081967
File:
PDF, 660 KB
english, 2009