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Structural evolution of platinum thin films grown by atomic layer deposition
Geyer, Scott M., Methaapanon, Rungthiwa, Johnson, Richard, Brennan, Sean, Toney, Mike F., Clemens, Bruce, Bent, StaceyVolume:
116
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4892104
Date:
August, 2014
File:
PDF, 2.35 MB
english, 2014