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Effect of the oxidation of TiN on the stability of the Al/TiN interface
Gagnon, G., Gujrathi, S. C., Caron, M., Currie, J. F., Tremblay, Y., Ouellet, L., Biberger, M., Reynolds, R.Volume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.362804
File:
PDF, 392 KB
english, 1996