![](/img/cover-not-exists.png)
[IEEE 2011 IEEE International Conference on Automation Science and Engineering (CASE 2011) - Trieste, Italy (2011.08.24-2011.08.27)] 2011 IEEE International Conference on Automation Science and Engineering - Regression methods for prediction of PECVD Silicon Nitride layer thickness
Purwins, Hendrik, Nagi, Ahmed, Barak, Bernd, Hockele, Uwe, Kyek, Andreas, Lenz, Benjamin, Pfeifer, Gunter, Weinzierl, KurtYear:
2011
Language:
english
DOI:
10.1109/case.2011.6042426
File:
PDF, 341 KB
english, 2011