[IEEE 2011 IEEE International Conference on Automation...

  • Main
  • [IEEE 2011 IEEE International...

[IEEE 2011 IEEE International Conference on Automation Science and Engineering (CASE 2011) - Trieste, Italy (2011.08.24-2011.08.27)] 2011 IEEE International Conference on Automation Science and Engineering - Regression methods for prediction of PECVD Silicon Nitride layer thickness

Purwins, Hendrik, Nagi, Ahmed, Barak, Bernd, Hockele, Uwe, Kyek, Andreas, Lenz, Benjamin, Pfeifer, Gunter, Weinzierl, Kurt
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2011
Language:
english
DOI:
10.1109/case.2011.6042426
File:
PDF, 341 KB
english, 2011
Conversion to is in progress
Conversion to is failed