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Surface Patterning by Local Plasma Jet Sacrificial Oxidation of Silicon
Paetzelt, Hendrik, Arnold, Thomas, Böhm, Georg, Pietag, Fred, Schindler, AxelVolume:
10
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201200099
Date:
May, 2013
File:
PDF, 444 KB
english, 2013