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[IEEE 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Gainesville, FL, USA (2010.09.28-2010.10.1)] 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Location- and orientation-controlled, large single grain silicon induced by pulsed excimer laser crystallization
Tajari Mofrad, M.R., Ishihara, R., van der Cingel, J., Beenakker, C.I.M.Year:
2010
Language:
english
DOI:
10.1109/rtp.2010.5623801
File:
PDF, 1.57 MB
english, 2010