S and Si ion implantation in GaSb grown on GaAs

S and Si ion implantation in GaSb grown on GaAs

Rao, Mulpuri V., Berry, Alok K., Do, Thang Q., Ridgway, M. C., Chi, P. H., Waterman, J.
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Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371655
File:
PDF, 291 KB
english, 1999
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