Identification of Si and SiH in catalytic chemical vapor...

Identification of Si and SiH in catalytic chemical vapor deposition of SiH[sub 4] by laser induced fluorescence spectroscopy

Nozaki, Yoshitaka, Kongo, Koichi, Miyazaki, Toshihiko, Kitazoe, Makiko, Horii, Katsuhiko, Umemoto, Hironobu, Masuda, Atsushi, Matsumura, Hideki
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Volume:
88
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1314330
File:
PDF, 324 KB
english, 2000
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